Old Web
English
Sign In
Acemap
>
Paper
>
Epitaxial Ge-on-Nothing and Epitaxial Ge on Si-on-Nothing as Virtual Substrates for 3D Device Stacking Technologies
Epitaxial Ge-on-Nothing and Epitaxial Ge on Si-on-Nothing as Virtual Substrates for 3D Device Stacking Technologies
2021
Roger Loo
Clement Porret
Han Han
A Srinivasan
E. Vecchio
V. Depauw
Keywords:
Epitaxy
Nothing
Engineering physics
Materials science
Stacking
Correction
Source
Cite
Save
Machine Reading By IdeaReader
23
References
0
Citations
NaN
KQI
[]