An in-process form error measurement system for precision machining

In-process form error measurement for precision machining is studied. Due to two key problems, opaque barrier and vibration, the study of in-process form error optical measurement for precision machining has been a hard topic and so far very few existing research works can be found. In this project, an in-process form error measurement device is proposed to deal with the two key problems. Based on our existing studies, a prototype system has been developed. It is the first one of the kind that overcomes the two key problems. The prototype is based on a single laser sensor design of 50 nm resolution together with two techniques, a damping technique and a moving average technique, proposed for use with the device. The proposed damping technique is able to improve vibration attenuation by up to 21 times compared to the case of natural attenuation. The proposed moving average technique is able to reduce errors by seven to ten times without distortion to the form profile results. The two proposed techniques are simple but they are especially useful for the proposed device. For a workpiece sample, the measurement result under coolant condition is only 2.5% larger compared with the one under no coolant condition. For a certified Wyko test sample, the overall system measurement error can be as low as 0.3 µm. The measurement repeatability error can be as low as 2.2%. The experimental results give confidence in using the proposed in-process form error measurement device. For better results, further improvement in design and tests are necessary.