Evaluation of resolution performance of high energy x-ray CT

Dimensional X-ray CT has attracted production industry due to its nature [1] enabling not only external dimensional measurement but also internal dimensional measurement which has been difficult for pre-existing dimensional measurement instruments. However, because the reconstruction process of three dimensional volume image may be affected by various kinds of error sources of the hardware and also the software, performance evaluation of dimensional X-ray CT has become one of the major issues [2], especially for X-ray CT system with higher energy such as several MeV. Resolution performance of high energy X-ray CT was evaluated by using a series of phantoms which equip regular line-and-space structures with various pitch sizes down to 100 micrometer. These phantoms were prototyped in the identical pitch sizes with three different materials. These phantoms were practically measured by a high energy X-ray CT. Results and perspective of the resolution performance is presented.