Structural Investigation of Highly Polarized Single-c-Domain thin Films Grown by Magnetron Sputtering with Raman Spectroscopy

Single-c-domain/single-crystal PZT thin films grown by rf magnetron sputtering on SrRuO3/Pt/MgO substrates was investigated by Raman spectroscopy. The Raman spectroscopy measurement revealed that the sputter deposited thin film has high quality and highly c domain oriented. In addition, Raman spectroscopy revealed the local strain configuration in the sputtered thin films from the surface to the substrates. These local stresses were discussed with dielectric property.