NANOSTRUCTURED GAS MICROSENSOR PLATFORM

Nanostructured materials, with their small grain size, large number of grain boundaries, and high specific surface area, hold promise to enable significant performance benefits for solid-state gas sensors. To fully realize this potential, precision nanoscale engineering of the morphology and composition of sensing materials is needed. Furthermore, multiple challenges are associated with integration of nanostructured materials into reliable and manufacturable microsensors. We will overview our efforts on addressing these challenges by developing a novel gas microsensor platform based on nanostructured alumina ceramic.