Proposed configurations for a high-repetition-rate position-sensitive atom probe

Abstract We consider the means available for dramatically increasing the data collection rate and mass resolution for position-sensitive atom probes. We conclude that thermal pulsing offers the best opportunity for improving these parameters. Pulsed electron beams can provide the thermal pulses, but will require very high current densities in small probes. Pulsed photon beam systems focused with reflecting objectives offer higher performance and simpler construction than existing laser pulsing systems. A position-sensitive detector using a wedge-and-strip anode, multichannel plates, and high-speed electronics provides necessary speed and resolution for single events. Hybrid multi-element detectors with integrated charge separation electronics handle multiple events at high repetition rates. Aquisition rates of 10 6 atoms per second should be achievable with systems incorporating these design elements.