Status of laminar grating manufacturing via lithography at HZB

In 2009 Carl Zeiss stopped the manufacture of precision gratings. All users of precision gratings were very concerned about this decision, since they all need such gratings for their experiments. One of the institutes of the HZB, the Institute for Nanometer Optics and Technology (INT), has extensive experience in micro fabrication (technology group). In spring 2010, HZB decided to take over the old C. Zeiss grating fabrication and build up its own technology center for grating fabrication. Using governmental support, HZB has installed all necessary equipment and processes to fabricate high quality gratings for the synchrotron radiation community.