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Effects of film type and nanotopography of wafers on oxide CMP characteristics
Effects of film type and nanotopography of wafers on oxide CMP characteristics
2002
Takeo Katoh
B.G. Ko
J. H. Park
H. C. Yoo
Jea-Gun Park
U. G. Paik
Keywords:
Nuclear magnetic resonance
Oxide
Physics
Wafer
Nanotopography
Molecular physics
Nanotechnology
Condensed matter physics
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