In situ magneto-optical ellipsometry data analysis for films growth control

Abstract In this work we present the way of ferromagnetic films study by means of magneto-ellipsometry. The method of interpretation of in situ magneto-optical ellipsometry spectra for real time growth control is described. The method has been successfully tested on Si / SiO 2 / Fe films within the model of a homogeneous semi-infinite medium. As a result, the dielectric tensor components for Fe layer were calculated using a developed approach.