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Evaluation of Barrier CMP Slurries and Characterization of ULK Material Properties Shifts Due to CMP
Evaluation of Barrier CMP Slurries and Characterization of ULK Material Properties Shifts Due to CMP
2008
Wei-Tsu Tseng
Dimitri Kioussis
Shravanthi L. Manikonda
Hyun-Ki Kim
Jihong Choi
Feng Zhao
Laertis Economikos
Nancy Klymko
Mark S. Chace
Steve Molis
Moosung Chae
Edward Engbrecht
Eden Zielinski
Connie Truong
David Watts
Keywords:
Material properties
Composite material
Materials science
Slurry
Chemical engineering
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