The measuring and calibrated method for MEMS magnetometer arrays

Aiming at the problem that the measurement noise of the MEMS magnetic sensor is large, the measurement unit of the array type of the MEMS magnetic sensor is designed by taking advantage of the small size of the sensor. The influence of measurement noise on calibration results is reduced. 32 signals of MEMS magnetometer arrays can be collected at the same time by reasonable hardware design. On the basis of hardware design, a general calibration method based on array MEMS magnetic sensor is designed by modeling and analysis of array MEMS magnetic sensor. The effectiveness of the proposed method is verified in simulation and real system experiments. The real system experimental results show that the normalized standard deviation of the calibrated data points of the MEMS magnetic sensor arrays are 70% lower than that of a single magnetic sensor.