Scanning Probe Microscopy Imaging of Nucleation and Electronic Structure Passivation during Atomic Layer Deposition on a Compound Semiconductor Surface

electronic structure passivation during atomic layer deposition on a compound semiconductor surface W. Melitz, J. B. Clemens, J. Shen, E. A. Chagarov, S. Lee, J. S. Lee, J. E. Royer,M. Holland, S. Bentley, D. McIntyre, I. Thayne, R. Droopad, A. C. Kummel 1 Dept. Chem. and Biochem., Univ. of California, San Diego, La Jolla, CA 92093-0358, U.S.A. 2 Dept. Electronics & Electrical Eng., Univ. of Glasgow, Glasgow, G12 8LT, Scotland, U.K. 3 Dept. Physics, Texas State Univ.-San Marcos, San Marcos, TX 78666, U.S.A.