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The characteristics of TiN films deposited by cyclic chemical vapor deposition
The characteristics of TiN films deposited by cyclic chemical vapor deposition
1999
Jangwoong Uhm
Sangsoo Lee
June-Woo Lee
Young Do Kim
Hyeongtag Jeon
Taeho Cha
Kyoung Soo Yi
Keywords:
Condensed matter physics
Tin
Chemical vapor deposition
Chemical engineering
Physics
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