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Sub-100 nm2 Cobalt Interconnects
Sub-100 nm2 Cobalt Interconnects
2018
Shibesh Dutta
Sofie Beyne
Anshul Gupta
Shreya Kundu
Sven Van Elshocht
Hugo Bender
Geraldine Jamieson
Wilfried Vandervorst
Jürgen Bömmels
Christopher J. Wilson
Zsolt Tokei
Christoph Adelmann
Keywords:
Analytical chemistry
Chemistry
Cobalt
Inorganic chemistry
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