Integrating NEMS/MEMS with IoT applications into an innovative ECE senior elective course

State of the art technologies in micro- and nano-electromechanical systems (MEMS and NEMS) devices have been proposed to address important issues in renewable energies, health sciences, consumer electronics, and information technology. Incorporation of MEMS / NEMS interfaces when creating a system on chip (SOC) utilizes knowledge of nanotechnology materials and devices, which is delivered as part of the new course. The new course offers software and hardware designs in nano and micro technology devices, along with widely-utilized interfaces to IoT devices and wireless systems. The course features hands-on practice on developing SOC's with MEMS / NEMS devices and is designed to prepare students for industrial and research careers. Advanced devices such as micro-motors/micro-robots, nanomotors/nano-robots, and means of navigating and imaging them within micro and nanoscale dimensions are covered with applications.