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Influence of magnetron powering mode on various properties of TiO2 thin films
Influence of magnetron powering mode on various properties of TiO2 thin films
2018
Artur Wiatrowski
M. Mazur
Agata Obstarczyk
Danuta Kaczmarek
Roman Pastuszek
Damian Wojcieszak
M Grobelny
M. Kalisz
Keywords:
Materials science
Composite material
Thin film
Cavity magnetron
Nanotechnology
Nanomaterials
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