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Fabrication and Mechanical Cycling of Polymer Microscale Architectures for 3D MEMS Sensors
Fabrication and Mechanical Cycling of Polymer Microscale Architectures for 3D MEMS Sensors
2019
Mohammad Humood
Joseph Lefebvre
Yan Shi
Mengdi Han
Coleman Fincher
Matt Pharr
John A. Rogers
Andreas A. Polycarpou
Keywords:
Polymer
Microelectromechanical systems
Cycling
Composite material
Materials science
Microscale chemistry
Fabrication
mems sensors
Nanotechnology
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