Old Web
English
Sign In
Acemap
>
Paper
>
Influence for Power Semiconductor Device Properties of Carbon Related Crystal Defect in Silicon Wafer
Influence for Power Semiconductor Device Properties of Carbon Related Crystal Defect in Silicon Wafer
2021
Sasaki Shun
Noritomo Mitsugi
Shuichi Samata
Masanori Tsukuda
Ichiro Omura
Keywords:
Carbon
Wafer
Materials science
Optoelectronics
Silicon
Power semiconductor device
Crystal
Correction
Source
Cite
Save
Machine Reading By IdeaReader
0
References
0
Citations
NaN
KQI
[]