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OPTIMIZATION OF THE CHEMICAL VAPOR DEPOSITION PROCESS FOR GALLIUM NITRIDE IN A VERTICAL ROTATING DISK REACTOR
OPTIMIZATION OF THE CHEMICAL VAPOR DEPOSITION PROCESS FOR GALLIUM NITRIDE IN A VERTICAL ROTATING DISK REACTOR
2015
Pradeep George
Jiandong Meng
Yogesh Jaluria
Keywords:
Chemical vapor deposition
Hybrid physical-chemical vapor deposition
Gallium nitride
Combustion chemical vapor deposition
Inorganic chemistry
Materials science
Chemical engineering
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