Development of Systematic Fitting Model for Nonlinear Nanoelectromechanical Resonance Analysis

A series of nonlinear resonance behaviors, observed for multiple systematically designed doubly-clamped NEMS resonators, have been successfully analyzed using a model which was developed based on the nonlinear Duffing equation and experimentally estimated parameter inputs. Key parameters in the model, such as resonance frequency, nonlinear cubic stiffness coefficient, and quality factor, have been extracted consistently by fitting the dataset taken under varied DC and AC biasing. Systematic nonlinear resonance with frequencies of up to 221MHz has been observed and analyzed for the first time. This result will be useful for analysis of further scaled NEMS resonators and for emerging applications of NEMS resonators where the nonlinearity is essential for device and system operation.