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Smooth and Conformal TiO2 Thin-Film Formation Using Supercritical Fluid Deposition
Smooth and Conformal TiO2 Thin-Film Formation Using Supercritical Fluid Deposition
2013
Yu Zhao
Kyubong Jung
Takeshi Momose
Yukihiro Shimogaki
Keywords:
Supercritical fluid
Thin film
Conformal map
Inorganic chemistry
Chemistry
Analytical chemistry
Deposition (law)
Chemical engineering
Correction
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