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Fabrication of Nano-gate Structure Organic Static Induction Transistor using Electron Beam Lithography
Fabrication of Nano-gate Structure Organic Static Induction Transistor using Electron Beam Lithography
2006
Masaharu Fukuda
Hiroshi Yamauchi
Masaaki Iizuka
Kazuhiro Kudo
Keywords:
Electron-beam lithography
Electronic engineering
Nano-
Nanotechnology
Static induction transistor
Materials science
Fabrication
Correction
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