Flexible PZT thin film transferred on polymer substrate

Abstract Highly flexible lead zirconate titanate, Pb(Zr,Ti)O 3 (PZT), thin films have been realized by an all chemical process on a plastic substrate. The procedure is composed of three steps: the first one is the PZT deposition on aluminium thin substrate, the second step corresponds to the bonding PZT thin film to a polymer layer and the final step is the aluminium substrate etching. Diffractions and microscopy techniques were used to check the quality of the new PZT/polymer composite structure. Polarization hysteresis and permittivity measurements were also performed to determine the electrical characteristics of the composite. These results demonstrate that the recently developed PZT/polymer thin films are very attractive for both bending actuation and sensing as well as for low frequency vibrating energy harvesting applications.