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Mechanical Properties of Micro Structures Fabricated by Focused Ion Beam Chemical Vapor Deposition
Mechanical Properties of Micro Structures Fabricated by Focused Ion Beam Chemical Vapor Deposition
2010
Makoto Takagi
Hiroyuki Nakayama
Akihito Matsumuro
Keywords:
Ion plating
Ion beam
Chemical vapor deposition
Combustion chemical vapor deposition
Electron beam physical vapor deposition
Focused ion beam
Inorganic chemistry
Pulsed laser deposition
Electron beam-induced deposition
Materials science
Chemical engineering
Metallurgy
Correction
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