Device for joining microwave energy

PURPOSE: To make whole power utilizable for inginting and retaining plasma, by providing a coaxial line between a hollow wave guide and a reaction chamber, and forming the reaction chamber and a resonator having many losses to a microwave frequency. CONSTITUTION: A coaxial line 4 is formed of two sections, and first sections 5 and 8 are formed at diameters same as these of 80 internal conductor 8, connected to a hollow microwave guide 2, and adopted as a transition section, and an external conductor 5. The minimum diameter D 1 of the conductor 5 is smaller than the diameter of a reaction chamber 14, and the maximum diameter D 2 is equal to the diameter of the reaction chamber 14. Second sections 6 and 9 are composed of the coaxial line 4, and thereon the reaction chamber 14 and also a resonator, having many losses to a used microwave frequency, are formed. The diameter ratio between the conductors 5 and 8 is constant, impedance is unchangeable, and E and H field joining is attained according to a configuration of the conductor 8. This can make the whole power of a microwave utilizable for igniting and retaining plasma. COPYRIGHT: (C)1993,JPO