Chemical vapor deposition of YBa/sub 2/Cu/sub 3/O/sub 7/minus//ital x// superconducting films

Superconducting thin films of YBa/sub 2/Cu/sub 3/O/sub 7/minus//ital x// have been producedby chemical vapor deposition. Volatile coordination compound precursors of theoxide components, ..beta..-diketonates of Y, Ba, and Cu, are thermally decomposed onhot substrates to form crystalline films. The Ba compound was evaporated in thepresence of externally added vapors of the ..beta..-diketonate to obtain steadyevaporative behavior. Superconducting films were obtained on SrTiO/sub 3/substrates at temperatures above 800 /degree/C. The best films have onsettemperatures of 90 K and loss of resistance as high as 68 K. Epitaxial growthwas obtained.