IDE embedded tungsten trioxide gas sensor for sensitive NO2 detection

Abstract In this work, a tungsten trioxide (WO 3 ) based sensitive gas sensor is developed and described. The WO 3 material is synthesized using sol-gel method and deposited over fabricated interdigitated electrodes (IDE) by drop casting method. The morphology, surface composition and structural properties of the deposited WO 3 film were investigated. The XRD and SAED show the monoclinic structure of WO 3 . The sensor shows highly selective nature towards nitrogen dioxide (NO 2 ) in the presence of different interfering gases like SO 2 , NH 3 , Cl 2 , CH 3 OH and C 3 H 6 O. The NO 2 gas responses for the 5–100 ppm concentrations were investigated at an optimum operating temperature of 200 °C. The sensor has an excellent reproducible gas response and supreme stability.