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Discharge Physics and Chemistry in Atmospheric Pressure RF Glow-like Plasmas
Discharge Physics and Chemistry in Atmospheric Pressure RF Glow-like Plasmas
1998
Jaeyoung Park
Gary S. Selwyn
I. Henins
J. Y. Jeong
Keywords:
Glow discharge
Atmospheric pressure
Absorption spectroscopy
Plasma
Metastability
Atomic physics
Steady state
Electric field
Radio frequency
Chemistry
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