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Formation of Si Nano Hole Arrays Using a Self-assembled Nanolithography Mask and Cu Fill of the Array
Formation of Si Nano Hole Arrays Using a Self-assembled Nanolithography Mask and Cu Fill of the Array
2013
Eiichi Kondoh
Kakeru Tamai
Michio Matsumura
Keywords:
Nanolithography
Nanotechnology
Inorganic chemistry
Nano-
Materials science
Metallurgy
self assembled
Correction
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