Old Web
English
Sign In
Acemap
>
Paper
>
Preparation of AIN Thin Films on GaAs ( 100 ) by RF Sputtering
Preparation of AIN Thin Films on GaAs ( 100 ) by RF Sputtering
1997
정성훈
김영호
송복식
문동찬
김선태
Keywords:
Nanotechnology
Thin film
Sputtering
Composite material
Materials science
Optoelectronics
Correction
Source
Cite
Save
Machine Reading By IdeaReader
0
References
0
Citations
NaN
KQI
[]