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Pinch Off Plasma CVD Deposition Process and Material Technology for Nano-Device Air Gap/Spacer Formation
Pinch Off Plasma CVD Deposition Process and Material Technology for Nano-Device Air Gap/Spacer Formation
2018
Son Van Nguyen
Thomas J. Haigh
Kangguo Cheng
Christopher J. Penny
Chanro Park
Jui-Lung Li
Sanjay C. Mehta
Tenko Yamashita
L. Jiang
D. Canaperi
Keywords:
Deposition (law)
Analytical chemistry
Nanotechnology
Plasma
Air gap (plumbing)
Pinch
Chemistry
Nano-device
material technology
deposition process
Correction
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