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Study on novel nano fine particles based on the fullerene structure for CMP on hard to process material
Study on novel nano fine particles based on the fullerene structure for CMP on hard to process material
2020
Hisayoshi Fuya
Yasunaga Takuo
Ouchi Shokichi
Panart Khajornrungruang
Suzuki Keisuke
Keywords:
Chemical substance
Search engine
Nano-
Nanotechnology
Fullerene
Science, technology and society
Materials science
Imagination
Correction
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