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Design and fabrication of waveguide for optical phase shifter using μc-Si:H
Design and fabrication of waveguide for optical phase shifter using μc-Si:H
2021
Yukinobu Nakajima
Yuya Shoji
Ryohei Takei
Tetsuya Mizumoto
Toshihiro Kamei
Keywords:
Waveguide (optics)
Phase shift module
Optoelectronics
Silicon photonics
Fabrication
Materials science
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