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Submicron Ferroelectric Capacitors Fabricated by CMP Process for High-Density FeRAMs
Submicron Ferroelectric Capacitors Fabricated by CMP Process for High-Density FeRAMs
1999
Yasushi Igarashi
Kouichi Tani
Masanori Kasai
Kinya Ashikaga
Toshio Ito
Keywords:
Nanotechnology
Capacitor
Ferroelectricity
Materials science
Electronic engineering
high density
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