NanoEx 3D Indenter

The FEI NanoEx 3D is a double-tilt TEM specimen holder that includes a nanoindenter system allowing in-situ nano-indentation specimen characterization.​ Record in situ point-to-point force measurement plus conductivity. The holder features double-tilt movement with a unique, patented 3D Piezo probe and MEMS-based indenter. Dynamic nano-mechanical processes, such as hardness, strain, adhesion, etc., can be studied, characterized, and quantified.