A 1-inch 2-M pixel HDTV CCD image sensor with tungsten photo-shield and H-CCD shunt wiring

A 1-inch 2-million pixel FIT-CCD image sensor for HDTV has been developed, which features a tungsten photo-shield and horizontal CCD (H-CCD) shunt wiring. Tungsten photo-shield, which has low reflectance and good step coverage characteristics, reduces smear level to -110 dB, combined with a frame-interline-transfer (FIT) scheme. The tungsten photo-shield also acts as a shunt busline, supplying transfer pulses to vertical CCD (V-CCD) electrodes, so that a 1.2/spl times/10/spl circ/5 electron charge handling capability is obtained at a frame transfer frequency of 1 MHz. Newly developed H-CCD shunt wiring suppresses vertical line pair FPN, even with smaller transfer pulse amplitudes. H-CCD shunt wiring also helps reduce power consumption in the H-CCD by 2/3 as compared to that achieved with conventional wiring. >