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Metal Particle Evolution Behavior during Metal Assisted Chemical Etching of Silicon
Metal Particle Evolution Behavior during Metal Assisted Chemical Etching of Silicon
2021
Ya Hu
Chensheng Jin
Ying Liu
Yang Xiaoyu
Zhiyuan Liao
Baoguo Zhang
Yilai Zhou
Ao Chen
Lin Wu
Jing Liu
Kuiqing Peng
Keywords:
Materials science
Silicon
metal particle
Chemical engineering
Isotropic etching
Metal
Correction
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