Three Dimension Thermal and Mechanical Simulation of Microbolometer to Detect Terahertz Wave

The teraherz (THz) wave in the far-infrared wave band has been showing its value in many areas in life. The detection of THz wave with microbolometer was simulated in this paper. The thermal and mechanical simulation were carried out by Intellisuite, a professional simulation software of MEMS. The influence of micro-bridge structure on the device performance was studied and simulation results showed that the bridge leg shape and width affected mainly on the thermal and mechanical properties of device. A compromise design between the thermal and mechanical properties was obtained in order to maintain the best performance of the device.