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RF-heating system of helicon-type for PLM-2 plasma device: design parameters
RF-heating system of helicon-type for PLM-2 plasma device: design parameters
2020
Tran Quang
V. A. Iachuk
V.P. Budaev
S D Fedorovich
Keywords:
Dielectric heating
Plasma
Helicon
Optoelectronics
Materials science
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