Organic EL element manufacturing technologies

Key technologies necessary for fabricating organic EL elements are thin film technology of organic high/low molecular materials and hybrid technology of organic, inorganic and oxide films. For the creation of the organic layers (hole injection, hole transport, emission, and electron transport) the processes can be divided into two types, wet and dry. Both processes require vacuum technology. In this paper, the basic concepts for the organic EL element manufacturing process and organic EL production systems using vacuum technology are described.