Rate of rotation sensor with multiple evaluation by operating at multiple frequencies

2015 
There will be a yaw rate sensor having a substrate having a main extension plane and having at least one opposite the substrate movable first structure and at least one opposite the substrate and opposite the first structure movable second structure and at least one opposite the substrate and opposite the first structure and in relation to the second structure movable third structure and proposed with at least one opposite the substrate and opposite the first structure and relative to the second structure and with respect to the third structure movable fourth structure, the rotation rate sensor, a drive device for the deflection of the first structure from a rest position of the first structure substantially parallel to a drive direction and to the displacement of the second structure from a rest position of the second structure are substantially parallel to the drive direction and to the displacement of the third structure from a rest position of the third structural tur substantially parallel to the drive direction and to the displacement of the fourth structure from a rest position of the fourth structure is substantially parallel to the drive direction in such a way includes that the first structure and the fourth structure to a substantially mutually phase oscillation and to the second structure, and the third structure to a substantially anti-phase oscillation at a first frequency can be excited, wherein the first structure and the second structure to a substantially mutually phase oscillation and the third structure and the fourth structure to a substantially anti-phase oscillation at a second frequency can be excited.
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