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Invited) Phthalocyanine Monolayer Nucleation of Gate Oxide ALD on Single Layer Graphene and TMD Surfaces
Invited) Phthalocyanine Monolayer Nucleation of Gate Oxide ALD on Single Layer Graphene and TMD Surfaces
2016
Andrew C. Kummel
Jun Hong Park
Iljo Kwak
Evgeniy Chagarov
Hema C. P. Movva
Harry Chou
Sanjay K. Banerjee
Sara Fathipour
Alan Seabaugh
Susan Fullerton
Suresh Vishwanath
Huili Grace Xing
Pabitra Choudhury
Keywords:
Gate oxide
Graphene
Nanotechnology
Monolayer
Nucleation
Phthalocyanine
Materials science
Inorganic chemistry
single layer graphene
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