Old Web
English
Sign In
Acemap
>
Paper
>
(Invited) Alternative Metals for Beyond-Cu Interconnects
(Invited) Alternative Metals for Beyond-Cu Interconnects
2020
Christoph Adelmann
Kiroubanand Sankaran
Shibesh Dutta
Anshul Gupta
Jean-Philippe Soulie
Marco Siniscalchi
S. Kundu
Ming Mao
Valeria Founta
N Jourdan
Marleen van der Veen
Ivan Ciofi
Ingrid De Wolf
Wilfried Vandervorst
Johan Swerts
Geoffrey Pourtois
Christopher J. Wilson
Zsolt Tokei
Keywords:
Nanotechnology
Materials science
Correction
Source
Cite
Save
Machine Reading By IdeaReader
0
References
0
Citations
NaN
KQI
[]