Aluminium nitride thin films for saw devices deposited by pulsed laser deposition

Jaime Andrés Pérez Taborda,Juan José Romero Fanego,Marisol S. Martín-González

Aluminium nitride thin films for saw devices deposited by pulsed laser deposition

2013

Jaime Andrés Pérez Taborda
Juan José Romero Fanego
Marisol S. Martín-González

Poster presentado en la 4th International Conference on Fundamentals and Applications of HIPIMS and Final Event of COST Action MP0804, celebrada en Braunschweig (Alemania) el 12 y 13 de junio de 2013.

Keywords:

Thin film
High-power impulse magnetron sputtering
Nanotechnology
Aluminium nitride
Metallurgy
Pulsed laser deposition
Materials science
cost action

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