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The Approach to Dislocation-free Ge Mesa on Si Fabricated by Dry Etching
The Approach to Dislocation-free Ge Mesa on Si Fabricated by Dry Etching
2009
Y. Takada
Jiro Osaka
Yasuhiko Ishikawa
Kazumi Wada
Keywords:
Dry etching
Nanotechnology
Dislocation
Composite material
Materials science
Mesa
dislocation free
Optoelectronics
Correction
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