A new type of highly sensitive portable ozone sensor operating at room temperature

In 2 O 3 (001) thin films were grown on (0001) sapphire by metal-organic chemical vapor deposition. Highly textured ln 2 O 3 films were tested as ozone sensors based on the photoreduction and oxidation effects. The sensors were found to have the largest sensitivity at room temperature. With such ln 2 O 3 based sensors, the ozone concentrations in a wide range from 15 ppb up to 92 ppm were measured.