High responsivity secondary ion energy analyzer

The degree of space charge compensation of a 70 mA, 400 keV pulsed hydrogen ion beam has been measured with the use of an electrostatic energy analyzer of secondary ions. The large azimuthal angle of the analyzer enables a high responsivity, defined as the ratio of the slow secondary ion current emerging from the partially-compensated ion beam to the fast ion beam current. We measured 84% space charge compensation of the ion beam. The current from the slow ions and the rise time from the degree of space charge compensation were measured and compared with expected values.