A Million-order Effective Quality Factor MEMS Resonator by Mechanical Pumping

This paper reports a simple novel method of effective quality factor (Q eff ) tuning by mechanical pumping. Through the red (anti-stokes) and blue (stokes) sideband activating, Q eff of the coupled MEMS resonator can be considerably adjusted. It is demonstrated that the decay time of the resonator can be greatly enhanced to 60.54 s (more than 100 times), which can be equivalent to a million-order (1.32 million) Q eff MEMS resonator. Additionally, the phenomenon of self-oscillation is observed at the blue sideband, which provides a new method of mode driving and mode locking without harmonic driving signal. Finally, the approach in this paper is also widely applicable to other MEMS/NEMS resonators, which may be useful for further researches on MEMS/NEMS sensors with high accuracy.