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△Microstructure analysis of β-FeSi 2 film by MOCVD method on Si with Ag layer
△Microstructure analysis of β-FeSi 2 film by MOCVD method on Si with Ag layer
2013
Shunichi Motomura
Keywords:
Microstructure
Metalorganic vapour phase epitaxy
Materials science
Inorganic chemistry
Chemical engineering
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