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Study of Ar/N$_{\mathrm{2}}$ microplasma sources for the production of atomic nitrogen for nitride deposition
Study of Ar/N$_{\mathrm{2}}$ microplasma sources for the production of atomic nitrogen for nitride deposition
2018
Salima Kasri
Kristaq Gazeli
Joao Santos Sousa
G. Bauville
Michel Fleury
S. Pasquiers
L. William
Xavier Aubert
Guillaume Lombardi
J. Achard
Alexandre Tallaire
Claudia Lazzaroni
Keywords:
Nitrogen
Deposition (law)
Microplasma
Nitride
Analytical chemistry
Materials science
Correction
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